Title :
Design Of Organic Resists For Excirner Laser Lithography
Author_Institution :
IBM Almaden Research Center
Keywords :
Adhesives; Etching; Image resolution; Lithography; Optical design; Planarization; Reflectivity; Resists; Thermal resistance; Thermal stability;
Conference_Titel :
Lasers and Electro-Optics Society Annual Meeting, 1988. Conference Proceedings. LEOS '88.
Conference_Location :
Santa Clara, CA, USA
DOI :
10.1109/LEOS.1988.689805
