DocumentCode :
3222420
Title :
Trace Impurity Detection In Semiconductors Using UV Laser Mass Spectrometry
Author :
Young, C.E. ; Pellin, M.J. ; Calaway, W.F. ; Burnett, J.W. ; Gruen, D.M.
Author_Institution :
Argonne National Laboratory
fYear :
1988
fDate :
2-4 Nov. 1988
Firstpage :
212
Lastpage :
217
Keywords :
Interference; Ionization; Isobaric; Isotopes; Laser modes; Mass spectroscopy; Optical pulses; Resonance; Semiconductor impurities; Semiconductor lasers;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics Society Annual Meeting, 1988. Conference Proceedings. LEOS '88.
Conference_Location :
Santa Clara, CA, USA
Type :
conf
DOI :
10.1109/LEOS.1988.689807
Filename :
689807
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3222420
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