Application of Simulation-Based Scheduling in a Semiconductor Backend Facility

A simulation-based interactive scheduling system for the backend facility of a semiconductor manufacturer was developed and tested under practical conditions. The special characteristic of the so called backendplanner is the automated model generation from existent production databases. The deterministic simulation model considers dispatch and setup rules and additionally includes a heuristic optimization component. The planning horizon reaches from one shift to one week. The fast simulator and the efficient data coupling strategy allows the re-scheduling anytime, e.g. after machine breakdowns or other unpredictable events. Several additional analyze tools report important parameters of the manufacturing process, such as machine utilization, throughput time or work in process. The basic principles are applicable not only in the semiconductor industry but also in other industrial sectors