DocumentCode :
322306
Title :
Polysilicon Micromachining And Industry
Author :
King, D.O. ; Ward, M.C.L.
Author_Institution :
DERA
fYear :
1997
fDate :
35754
Firstpage :
42370
Lastpage :
42371
fLanguage :
English
Publisher :
iet
Conference_Titel :
Recent Advances in Micromachining Techniques (Digest No: 1997/081), IEE Colloquium
Conference_Location :
IET
Type :
conf
Filename :
663256
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=322306
