مرکز منطقه ای اطلاع رساني علوم و فناوري - Screen Printing Of Thick Piezoelectric PZT Layers Onto Silicon Micromachined Membranes

DocumentCode :

322307

Title :

Screen Printing Of Thick Piezoelectric PZT Layers Onto Silicon Micromachined Membranes

Author :

Koch, M. ; Harris, N. ; Evans, A.G.R. ; White, N.M. ; Brunnschweiler, A.

Author_Institution :

University of Southampton

fYear :

1997

fDate :

35754

Firstpage :

42401

Lastpage :

42403

fLanguage :

English

Publisher :

iet

Conference_Titel :

Recent Advances in Micromachining Techniques (Digest No: 1997/081), IEE Colloquium

Conference_Location :

IET

Type :

conf

Filename :

663257

Link To Document :