DocumentCode

322309

Title

3D UV-Microforming: A Low-Cost New Technology For Surface Micromachining

Author

Qu, W. ; Wenzel, C. ; Drescher, K.

Author_Institution

Dresden University of Technology

fYear

1997

fDate

35754

Firstpage

42461

Lastpage

42463

fLanguage

English

Publisher

iet

Conference_Titel

Recent Advances in Micromachining Techniques (Digest No: 1997/081), IEE Colloquium

Conference_Location

IET

Type

conf

Filename

663259