Title :
3D UV-Microforming: A Low-Cost New Technology For Surface Micromachining
Author :
Qu, W. ; Wenzel, C. ; Drescher, K.
Author_Institution :
Dresden University of Technology
Conference_Titel :
Recent Advances in Micromachining Techniques (Digest No: 1997/081), IEE Colloquium
Conference_Location :
IET
