Recent Advances In Surface Finish And Anisotropy In The Micromachining Of Silicon In Koh

Author

Schiffrin, D.J. ; Baum, T.

Author_Institution

University of Liverpool

fYear

1997

fDate

35754

Firstpage

42522

Lastpage

42524

fLanguage

English

Publisher

iet

Conference_Titel

Recent Advances in Micromachining Techniques (Digest No: 1997/081), IEE Colloquium

Conference_Location

IET

Type

Filename

663261

Link To Document