مرکز منطقه ای اطلاع رساني علوم و فناوري - Recent Advances In Surface Finish And Anisotropy In The Micromachining Of Silicon In Koh

DocumentCode :

322311

Title :

Recent Advances In Surface Finish And Anisotropy In The Micromachining Of Silicon In Koh

Author :

Schiffrin, D.J. ; Baum, T.

Author_Institution :

University of Liverpool

fYear :

1997

fDate :

35754

Firstpage :

42522

Lastpage :

42524

fLanguage :

English

Publisher :

iet

Conference_Titel :

Recent Advances in Micromachining Techniques (Digest No: 1997/081), IEE Colloquium

Conference_Location :

IET

Type :

conf

Filename :

663261

Link To Document :