DocumentCode :
322314
Title :
Focused Ion Beams For Microfabrication
Author :
Daniel, J.H. ; Moore, D.F. ; Walker, J.F.
Author_Institution :
Cambridge University
fYear :
1997
fDate :
35754
Firstpage :
42614
Lastpage :
42619
fLanguage :
English
Publisher :
iet
Conference_Titel :
Recent Advances in Micromachining Techniques (Digest No: 1997/081), IEE Colloquium
Conference_Location :
IET
Type :
conf
Filename :
663264
Link To Document :
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