Title :
Micromechanical membrane switches for microwave applications
Author :
Goldsmith, Charles ; Tsen-Hwang Lin ; Powers, B. ; Wen-Rong Wu ; Norvell, B.
Author_Institution :
Texas Instrum. Inc., USA
Abstract :
This paper proposes the fabrication of low-cost, low-loss microwave switches using thin metal membranes actuated by electrostatic fields. Measurement of switch test structures and modeling indicates that these devices have a potential 1000 to 2000-GHz figure-of-merit. Various aspects of fabrication, design, performance, and application of these devices are discussed.<>
Keywords :
membranes; micromechanical devices; microwave devices; switches; electrostatic fields; micromechanical membrane switches; microwave applications; switch test structures; thin metal membranes; Biomembranes; Contacts; Dry etching; Electrodes; Instruments; Micromechanical devices; Microwave devices; Optical arrays; Optical device fabrication; Optical switches;
Conference_Titel :
Microwave Symposium Digest, 1995., IEEE MTT-S International
Conference_Location :
Orlando, FL, USA
Print_ISBN :
0-7803-2581-8
DOI :
10.1109/MWSYM.1995.406090
