Title :
Nondestructive Depth Profiling Of Semiconductor Multilayer Structures By Resonant Attenuated Total Reflectance (ATR) Techniques
Author :
Bosacchi, B. ; Oehrle, R.C. ; Cook, T.B. ; De La Rosa, J.G.
Author_Institution :
AT&T Engineering Research Center
Keywords :
Hafnium; Nonhomogeneous media; Optical reflection; Reflectivity; Resonance; TV; Wavelength measurement;
Conference_Titel :
Lasers and Electro-Optics Society Annual Meeting, 1988. Conference Proceedings. LEOS '88.
DOI :
10.1109/LEOS.1988.689819
