DocumentCode :
322401
Title :
Micro Servocontrol Of Silicon Diaphragms Driven By Electrostatic Force
Author :
Harada, Masanobu ; Sato, Kazuo ; Fujita, Hiroyuki
Author_Institution :
The University of Tokyo
Volume :
2
fYear :
1988
fDate :
24-28 Oct. 1988
Firstpage :
489
Lastpage :
494
Keywords :
Capacitive sensors; Displacement control; Electrostatic actuators; Force feedback; Magnetic anisotropy; Microactuators; Perpendicular magnetic anisotropy; Servosystems; Silicon; Voltage control;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Industrial Electronics Society, 1988. IECON '88. Proceedings., 14 Annual Conference of
Conference_Location :
Singapore
Type :
conf
DOI :
10.1109/IECON.1988.665187
Filename :
665187
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=322401
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