Title :
Closed-loop measurement of equipment efficiency and equipment capacity
Author :
Leachman, Robert C.
Author_Institution :
Dept. of Ind. Eng. & Oper. Res., California Univ., Berkeley, CA, USA
Abstract :
Formal definitions for the components of efficiency and capacity, mathematical formulas for computing overall efficiency, and data collection strategies are proposed for rigorous measurement of equipment efficiency and equipment capacity. Measurement of overall equipment efficiency (OEE) under the TPM paradigm is extended to support the maintenance of capacity parameters for production planning. The weaknesses of equipment analyses based on utilization and aggregate UPH (units per hour) figures are contrasted against the robustness of the proposed approach. Implementation in semiconductor factories is described.
Keywords :
closed loop systems; human resource management; integrated circuit manufacture; integrated circuit measurement; maintenance engineering; production testing; TPM paradigm; closed-loop measurement; data collection strategies; equipment analyses; equipment capacity; overall equipment efficiency; production planning; semiconductor factories; total productive maintenance; Capacity planning; Job shop scheduling; Manufacturing industries; Performance evaluation; Production facilities; Production planning; Productivity; Semiconductor device manufacture; Time measurement; Total quality management;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 1995. ASMC 95 Proceedings. IEEE/SEMI 1995
Print_ISBN :
0-7803-2713-6
DOI :
10.1109/ASMC.1995.484352
