DocumentCode
3224846
Title
The SEM/FIB Workbench: Automated nanorobotics system inside of scanning electron or focussed ion beam microscopes
Author
Klocke, Volker ; Jones, Greg
Author_Institution
Klocke Nanotechnik GmbH, Aachen, Germany
fYear
2011
fDate
15-18 Aug. 2011
Firstpage
1510
Lastpage
1515
Abstract
In light microscopy it is natural for everybody to use manual or automatic toolsets like tweezers, knives, hooks, probes and several different measurement tools. Without such handling, manipulation and manufacturing tools many present-day products and methods would not exist. No wristwatch, no in vitro fertilization, no mini-gearbox, just to mention a few. The operators of SEM, FIB or Dual Beam systems generally work without toolsets and call it natural, although the wavelength limit of light is no physical boundary for using such tools. It can be imagined how technology would be pushed when a SEM/FIB Workbench reaches the same degree of practicability and utilization as toolsets for light microscopes.
Keywords
focused ion beam technology; ion beams; optical microscopes; optical microscopy; robots; scanning electron microscopy; SEM-FIB workbench; automated nanorobotics system; automatic toolset; dual beam system; focussed ion beam microscope; light microscopy; scanning electron microscope; Automation; Grippers; Manipulators; Materials; Scanning electron microscopy; Wires;
fLanguage
English
Publisher
ieee
Conference_Titel
Nanotechnology (IEEE-NANO), 2011 11th IEEE Conference on
Conference_Location
Portland, OR
ISSN
1944-9399
Print_ISBN
978-1-4577-1514-3
Electronic_ISBN
1944-9399
Type
conf
DOI
10.1109/NANO.2011.6144338
Filename
6144338
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