Title :
The SEM/FIB Workbench: Automated nanorobotics system inside of scanning electron or focussed ion beam microscopes
Author :
Klocke, Volker ; Jones, Greg
Author_Institution :
Klocke Nanotechnik GmbH, Aachen, Germany
Abstract :
In light microscopy it is natural for everybody to use manual or automatic toolsets like tweezers, knives, hooks, probes and several different measurement tools. Without such handling, manipulation and manufacturing tools many present-day products and methods would not exist. No wristwatch, no in vitro fertilization, no mini-gearbox, just to mention a few. The operators of SEM, FIB or Dual Beam systems generally work without toolsets and call it natural, although the wavelength limit of light is no physical boundary for using such tools. It can be imagined how technology would be pushed when a SEM/FIB Workbench reaches the same degree of practicability and utilization as toolsets for light microscopes.
Keywords :
focused ion beam technology; ion beams; optical microscopes; optical microscopy; robots; scanning electron microscopy; SEM-FIB workbench; automated nanorobotics system; automatic toolset; dual beam system; focussed ion beam microscope; light microscopy; scanning electron microscope; Automation; Grippers; Manipulators; Materials; Scanning electron microscopy; Wires;
Conference_Titel :
Nanotechnology (IEEE-NANO), 2011 11th IEEE Conference on
Conference_Location :
Portland, OR
Print_ISBN :
978-1-4577-1514-3
Electronic_ISBN :
1944-9399
DOI :
10.1109/NANO.2011.6144338