• DocumentCode
    3224846
  • Title

    The SEM/FIB Workbench: Automated nanorobotics system inside of scanning electron or focussed ion beam microscopes

  • Author

    Klocke, Volker ; Jones, Greg

  • Author_Institution
    Klocke Nanotechnik GmbH, Aachen, Germany
  • fYear
    2011
  • fDate
    15-18 Aug. 2011
  • Firstpage
    1510
  • Lastpage
    1515
  • Abstract
    In light microscopy it is natural for everybody to use manual or automatic toolsets like tweezers, knives, hooks, probes and several different measurement tools. Without such handling, manipulation and manufacturing tools many present-day products and methods would not exist. No wristwatch, no in vitro fertilization, no mini-gearbox, just to mention a few. The operators of SEM, FIB or Dual Beam systems generally work without toolsets and call it natural, although the wavelength limit of light is no physical boundary for using such tools. It can be imagined how technology would be pushed when a SEM/FIB Workbench reaches the same degree of practicability and utilization as toolsets for light microscopes.
  • Keywords
    focused ion beam technology; ion beams; optical microscopes; optical microscopy; robots; scanning electron microscopy; SEM-FIB workbench; automated nanorobotics system; automatic toolset; dual beam system; focussed ion beam microscope; light microscopy; scanning electron microscope; Automation; Grippers; Manipulators; Materials; Scanning electron microscopy; Wires;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nanotechnology (IEEE-NANO), 2011 11th IEEE Conference on
  • Conference_Location
    Portland, OR
  • ISSN
    1944-9399
  • Print_ISBN
    978-1-4577-1514-3
  • Electronic_ISBN
    1944-9399
  • Type

    conf

  • DOI
    10.1109/NANO.2011.6144338
  • Filename
    6144338