A model for intra industry, supplier, and SEMATECH collaboration including an inter-group effort by industry

A model is presented for an intra semiconductor user-equipment supplier-SEMATECH project effort. The on-going 0.25 μm Source/Drain Rapid Thermal Process (S/D RTP) project is used as the basis for this model. The successful completion of this project supports the model\´s assertions. A methodological approach taken from the initial stages of a project to the completion generates valuable and valid data, provides a planned strategy, allows for timely allocation of resources, and results in a win-win situation for all involved. This model will be referred to as "Model for Supplier/User Partnering" or MSUP.