Characterization of langasite for application in high temperature SAW sensors

Experimental SAW resonator structures with iridium electrodes were fabricated on Y-cut of langasite with few different propagation directions and their characteristics were measured in a wide temperature interval, up to 700°C, and compared with simulations. Between two sets of material constants reported by Bungo one set was selected as providing much better agreement with experiments, for the analyzed orientations. Further improvement of simulation accuracy was achieved via after-correction of the calculated temperature characteristics using auxiliary function extracted from experimental data. This approach was used to predict resonator characteristics in orientation with Euler angles (0°, 22°, 90°), in which Bluestein-Gulyaev wave propagates, and provided excellent agreement between experiments and simulations, in a wide temperature interval.