Title :
Characterization of langasite for application in high temperature SAW sensors
Author :
Sakharov, S. ; Naumenko, N. ; Zabelin, A. ; Zhgoon, S.
Author_Institution :
Fomos-Mater., Moscow, Russia
Abstract :
Experimental SAW resonator structures with iridium electrodes were fabricated on Y-cut of langasite with few different propagation directions and their characteristics were measured in a wide temperature interval, up to 700°C, and compared with simulations. Between two sets of material constants reported by Bungo one set was selected as providing much better agreement with experiments, for the analyzed orientations. Further improvement of simulation accuracy was achieved via after-correction of the calculated temperature characteristics using auxiliary function extracted from experimental data. This approach was used to predict resonator characteristics in orientation with Euler angles (0°, 22°, 90°), in which Bluestein-Gulyaev wave propagates, and provided excellent agreement between experiments and simulations, in a wide temperature interval.
Keywords :
gallium compounds; iridium; lanthanum compounds; surface acoustic wave resonators; surface acoustic wave sensors; wave propagation; Bluestein-Gulyaev wave propagation; Euler angle; La3Ga5SiO14-Ir; SAW resonator structure; auxiliary function extraction; electrode; high temperature SAW sensor; material constant; wide temperature interval; Frequency measurement; Resonant frequency; Surface acoustic waves; Temperature distribution; Temperature measurement; Temperature sensors;
Conference_Titel :
Ultrasonics Symposium (IUS), 2011 IEEE International
Conference_Location :
Orlando, FL
Print_ISBN :
978-1-4577-1253-1
DOI :
10.1109/ULTSYM.2011.0568