DocumentCode :
3226957
Title :
Multi-layer graphene grid and nanowire fabrication and printing
Author :
Rahman, Masudur ; Norton, Michael L.
Author_Institution :
Dept. of Chem., Marshall Univ., Huntington, WV, USA
fYear :
2011
fDate :
15-18 Aug. 2011
Firstpage :
592
Lastpage :
595
Abstract :
Molecular sensor fabrication requires the development of methods to produce nanostructures and transfer them onto useful substrates. This paper will briefly describe methods of patterning and printing of highly oriented pyrolytic graphite (HOPG). HOPG has been patterned at the micron and ~100 nanometer scale, using oxygen plasma etching and phase-shift lithography, respectively. The micron scale patterned HOPG was exfoliated using a thermal tape printing process, to transfer highly crystalline multi-layer graphene (MLG) constructs onto glass substrates. A soft lithography technique, stamping, was employed to print 100nm wide few layer graphene (FLG) nanowires onto PDMS substrates.
Keywords :
graphene; graphite; multilayers; nanofabrication; nanopatterning; nanowires; soft lithography; sputter etching; C; PDMS substrates; SiO2; crystalline multilayer graphene; glass substrates; highly oriented pyrolytic graphite; micron-scale patterning; molecular sensor fabrication; multilayer graphene grid; nanowire fabrication; oxygen plasma etching; phase-shift lithography; size 100 nm; soft lithography; stamping; thermal tape printing; Glass; Lithography; Nanobioscience; Plasmas; Printing; Scanning electron microscopy; Substrates; Graphene; PDMS; Phase-Shift lithography; nanowire; soft lithography;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Nanotechnology (IEEE-NANO), 2011 11th IEEE Conference on
Conference_Location :
Portland, OR
ISSN :
1944-9399
Print_ISBN :
978-1-4577-1514-3
Electronic_ISBN :
1944-9399
Type :
conf
DOI :
10.1109/NANO.2011.6144440
Filename :
6144440
Link To Document :
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