Title :
Design and fabrication of 2-bit loaded-line MEMS phase shifter
Author :
Lou, Jianzhong ; Hao, Jinzhong ; Hu, Xiaodong ; Li, Qian ; Dai, Pengchao
Author_Institution :
Coll. of Electron. & Inf. Eng., Hebei Univ., Baoding, China
Abstract :
A 2-bit loaded-line MEMS phase shifter is designed and fabricaded. 4 series MEMS capacitance switch is used for change loaded-line Impedance. The measured result is demonstrated that maximal return loss is less than -20 dB, and insertion loss is better than -2.5 dB from 9.5 GHz to 10 GHz, with phase shift is 15°/30°/45°.
Keywords :
capacitance; microswitches; microwave phase shifters; 2-bit loaded-line MEMS phase shifter fabrication; 4 series MEMS capacitance switch; frequency 9.5 GHz to 10 GHz; insertion loss; loaded-line impedance; return loss; Capacitance; Dielectric substrates; Fabrication; Impedance; Insertion loss; Micromechanical devices; Microstrip; Microswitches; Phase shifters; Switches; Microelectromechanical system (MEMS); Phase shifter; loaded-line;
Conference_Titel :
Microwave and Millimeter Wave Technology (ICMMT), 2010 International Conference on
Conference_Location :
Chengdu
Print_ISBN :
978-1-4244-5705-2
DOI :
10.1109/ICMMT.2010.5524754
