Title :
A spot-size transformer for fiber-chip coupling in sensor applications at 633 nm in silicon oxynitride
Author :
De Ridder, René M. ; Wijbrans, Rokus A. ; Albers, Hans ; Aukema, Jacob S. ; Lambeck, Paul V. ; Hoekstra, Hugo J W M ; Driessen, Alfred
Author_Institution :
MESA Res. Inst., Twente Univ., Enschede, Netherlands
fDate :
30 Oct-2 Nov 1995
Abstract :
A mode-size adapter was designed, fabricated in SiON/SiO2 and tested. It consists of a laterally tapered SiON waveguide having a step-wise decrease in thickness towards the taper point which may have up to 0.5 μm residual width
Keywords :
fibre optic sensors; optical design techniques; optical fibre couplers; optical fibre fabrication; optical fibre testing; silicon compounds; 0.5 mum; 633 nm; SiON-SiO2; SiON/SiO2; design; fabrication; fiber-chip coupling; laterally tapered SiON waveguide; mode-size adapter; residual width; sensor applications; spot-size transformer; step-wise thickness; taper point; testing; Chemical lasers; Fiber lasers; Jacobian matrices; Lithography; Optical fiber sensors; Optical fiber testing; Optical materials; Semiconductor materials; Semiconductor waveguides; Silicon;
Conference_Titel :
Lasers and Electro-Optics Society Annual Meeting, 1995. 8th Annual Meeting Conference Proceedings, Volume 1., IEEE
Conference_Location :
San Francisco, CA
Print_ISBN :
0-7803-2450-1
DOI :
10.1109/LEOS.1995.484609
