A spot-size transformer for fiber-chip coupling in sensor applications at 633 nm in silicon oxynitride

Author

De Ridder, René M. ; Wijbrans, Rokus A. ; Albers, Hans ; Aukema, Jacob S. ; Lambeck, Paul V. ; Hoekstra, Hugo J W M ; Driessen, Alfred

Author_Institution

MESA Res. Inst., Twente Univ., Enschede, Netherlands

Volume

2

fYear

1995

fDate

30 Oct-2 Nov 1995

Firstpage

86

Abstract

A mode-size adapter was designed, fabricated in SiON/SiO₂ and tested. It consists of a laterally tapered SiON waveguide having a step-wise decrease in thickness towards the taper point which may have up to 0.5 μm residual width

Keywords

fibre optic sensors; optical design techniques; optical fibre couplers; optical fibre fabrication; optical fibre testing; silicon compounds; 0.5 mum; 633 nm; SiON-SiO₂; SiON/SiO₂; design; fabrication; fiber-chip coupling; laterally tapered SiON waveguide; mode-size adapter; residual width; sensor applications; spot-size transformer; step-wise thickness; taper point; testing; Chemical lasers; Fiber lasers; Jacobian matrices; Lithography; Optical fiber sensors; Optical fiber testing; Optical materials; Semiconductor materials; Semiconductor waveguides; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics Society Annual Meeting, 1995. 8th Annual Meeting Conference Proceedings, Volume 1., IEEE

Conference_Location

San Francisco, CA

Print_ISBN

0-7803-2450-1

Type

conf

DOI

10.1109/LEOS.1995.484609

Filename

484609