• DocumentCode
    3228213
  • Title

    Electrode Patterning for Organic Diodes by Roll-to-Roll Processes

  • Author

    Lu, Chih-Chiang ; Yuo, Hsin-Lin ; Lin, Chjang-Yu ; Hou, Jack

  • Author_Institution
    Electron. & Opto-Electron. Labs., Ind. Technol. Res. Inst., Hsinchu
  • fYear
    2008
  • fDate
    21-24 Jan. 2008
  • Firstpage
    1
  • Lastpage
    3
  • Abstract
    A roll-to-roll (R2R) photo-lithographic process using a negative dry film photo-resist was used to pattern ITO on a PET film. The roll type of PET film with patterned ITO was used as one of the electrodes for printed organic diodes fabrication. The web width of the roll-to-roll manufacturing line is 250 mm and the speed can be adjusted from 1 m/min to 3 m/min. The patterned ITO electrode made by the R2R photo-lithographic process showed a feature size less than 10 mum. A polymer diode device was fabricated by coating a polymer conductor and semiconductor on the patterned ITO electrode followed by thermal evaporating a cathode electrode on the semiconductor layer. The diode DC transfer curve showed a Vt at around 0.5V and a ON/OFF ratio above 104. These results demonstrated the feasibility of using the R2R processes for fabricating organic electronics devices.
  • Keywords
    cathodes; conductors (electric); diodes; photolithography; polymers; PET film; R2R photo-lithographic process; cathode electrode; diode DC transfer curve; electrode patterning; negative dry film photo-resist; organic electronics devices; polymer conductor; polymer diode device; printed organic diodes fabrication; roll-to-roll manufacturing line; roll-to-roll processes; semiconductor layer; thermal evaporating; Coatings; Conductors; Electrodes; Fabrication; Indium tin oxide; Manufacturing; Polymer films; Positron emission tomography; Semiconductor diodes; Thermal conductivity; R2R; Roll-to-roll; flexible electronics device; negative dry film photo-resist; patterned ITO; photo-lithographic; polymer diodes; wet bench;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Flexible Electronics and Displays Conference and Exhibition, 2008
  • Conference_Location
    Phoenix, AZ
  • Print_ISBN
    978-1-4244-2053-7
  • Electronic_ISBN
    978-1-4244-2054-4
  • Type

    conf

  • DOI
    10.1109/FEDC.2008.4483872
  • Filename
    4483872