Influence of the crystallographic orientation of Pb(Zr,Ti)O3 films on the transverse piezoelectric coefficient d31

In this paper, we present the fabrication of micro cantilevers and the extraction of the transverse piezoelectric coefficient d₃₁. Micro cantilevers were fabricated on SOI wafers by surface micromachining processes. By controlling the crystallization conditions, 2 μm-thick (100) and (111) highly oriented PZT films were obtained. Piezoelectric properties were compared according to two crystalline orientations. A model was adapted to extract d₃₁ from deflection measurements. The interest of this d₃₁ extraction is that the piezoelectric coefficient is performed in actual conditions of actuation.