Title :
Self assembled Cu nanowires on vicinal Si(001) by the E-beam evaporation method
Author :
Ng, Poh-Keong ; Fisher, Brandon ; Bode, Matthias ; Lilley, Carmen M.
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Illinois at Chicago, Chicago, IL, USA
Abstract :
This paper describes an experimental procedure for growing self assembled Cu nanowires on a 4° miscut Si(001) substrate with and without the native oxide layer by the e-beam evaporation method. The physical characteristics of the Cu nanowires were observed using an in situ and ex situ scanning electron microscope (SEM). The results are compared with Ag nanowires that were fabricated with the same procedure.
Keywords :
copper; electron beam deposition; nanofabrication; nanowires; scanning electron microscopy; self-assembly; Cu; E-beam evaporation method; SEM; Si; ex situ scanning electron microscopy; in situ scanning electron microscopy; miscut Si(001) substrate; native oxide layer; physical characteristics; self assembled nanowires; vicinal Si(001); Copper; Nanowires; Physics; Scanning electron microscopy; Silicon; Substrates; Self assembled Cu nanowires; e-beam evaporation method; focus-ion-beam (FIB); native oxide; scanning electron microscope (SEM);
Conference_Titel :
Nanotechnology (IEEE-NANO), 2011 11th IEEE Conference on
Conference_Location :
Portland, OR
Print_ISBN :
978-1-4577-1514-3
Electronic_ISBN :
1944-9399
DOI :
10.1109/NANO.2011.6144548
