Piezoelectric response of novel multiferroic microcantilevers

Author

Prashanthi, K. ; Thundat, T. ; Palkar, V.R.

Author_Institution

Dept. of Electr. Eng., Indian Inst. of Technol., Mumbai, India

fYear

2011

fDate

24-27 July 2011

Firstpage

1

Lastpage

3

Abstract

Recently developed magnetoelectric (M-E) multiferroic system, Dy modified BiFeO₃ (Bi_0.7Dy_0.3FeO₃ or BDFO) exhibits ferromagnetism and ferroelectricity at room temperature with significant M-E coupling. We have been successful in developing a CMOS compatible MEMS fabrication process using BDFO and fabricated BDFO microcantilevers directly on Si. The fabricated BDFO cantilevers are tested for the actuation using magnetic as well as electric fields. In this paper, the piezoelectric behavior of BDFO thin films and microcantilevers directly fabricated on Si are reported. These results suggest BDFO as a possible substitute for lead-free MEMS in the near future.

Keywords

atomic force microscopy; bismuth compounds; cantilevers; dysprosium compounds; ferroelectric materials; ferroelectric thin films; ferromagnetic materials; magnetic thin films; magnetoelectric effects; microactuators; multiferroics; piezoelectric materials; piezoelectric thin films; BDFO microcantilevers; BDFO thin films; Bi_0.7Dy_0.3FeO₃; Dy modified BiFeO₃; MEMS; Si; actuation; ferroelectricity; ferromagnetism; magnetoelectric coupling; magnetoelectric multiferroic system; microelectromechanical devices; multiferroic microcantilevers; piezoelectric response; piezoresponse force microscopy; temperature 293 K to 298 K; Force; Magnetic domains; Magnetic resonance imaging; Magnetoelectric effects; Micromechanical devices; Silicon; Microelectromechanical devices; multiferroic thin films; piezoresponse force microscopy;

fLanguage

English

Publisher

ieee

Conference_Titel

Applications of Ferroelectrics (ISAF/PFM), 2011 International Symposium on and 2011 International Symposium on Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials

Conference_Location

Vancouver, BC

Print_ISBN

978-1-4577-1162-6

Electronic_ISBN

978-1-4577-1161-9

Type

conf

DOI

10.1109/ISAF.2011.6014157

Filename

6014157