DocumentCode :
3229339
Title :
Piezoelectric response of novel multiferroic microcantilevers
Author :
Prashanthi, K. ; Thundat, T. ; Palkar, V.R.
Author_Institution :
Dept. of Electr. Eng., Indian Inst. of Technol., Mumbai, India
fYear :
2011
fDate :
24-27 July 2011
Firstpage :
1
Lastpage :
3
Abstract :
Recently developed magnetoelectric (M-E) multiferroic system, Dy modified BiFeO3 (Bi0.7Dy0.3FeO3 or BDFO) exhibits ferromagnetism and ferroelectricity at room temperature with significant M-E coupling. We have been successful in developing a CMOS compatible MEMS fabrication process using BDFO and fabricated BDFO microcantilevers directly on Si. The fabricated BDFO cantilevers are tested for the actuation using magnetic as well as electric fields. In this paper, the piezoelectric behavior of BDFO thin films and microcantilevers directly fabricated on Si are reported. These results suggest BDFO as a possible substitute for lead-free MEMS in the near future.
Keywords :
atomic force microscopy; bismuth compounds; cantilevers; dysprosium compounds; ferroelectric materials; ferroelectric thin films; ferromagnetic materials; magnetic thin films; magnetoelectric effects; microactuators; multiferroics; piezoelectric materials; piezoelectric thin films; BDFO microcantilevers; BDFO thin films; Bi0.7Dy0.3FeO3; Dy modified BiFeO3; MEMS; Si; actuation; ferroelectricity; ferromagnetism; magnetoelectric coupling; magnetoelectric multiferroic system; microelectromechanical devices; multiferroic microcantilevers; piezoelectric response; piezoresponse force microscopy; temperature 293 K to 298 K; Force; Magnetic domains; Magnetic resonance imaging; Magnetoelectric effects; Micromechanical devices; Silicon; Microelectromechanical devices; multiferroic thin films; piezoresponse force microscopy;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Applications of Ferroelectrics (ISAF/PFM), 2011 International Symposium on and 2011 International Symposium on Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials
Conference_Location :
Vancouver, BC
Print_ISBN :
978-1-4577-1162-6
Electronic_ISBN :
978-1-4577-1161-9
Type :
conf
DOI :
10.1109/ISAF.2011.6014157
Filename :
6014157
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3229339
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