• DocumentCode
    3229882
  • Title

    ZnO nanowire growth by physical vapor deposition

  • Author

    Tigli, Onur ; Juhala, Jason

  • Author_Institution
    Electr. & Comput. Eng., Univ. of Miami, Coral Gables, FL, USA
  • fYear
    2011
  • fDate
    15-18 Aug. 2011
  • Firstpage
    608
  • Lastpage
    611
  • Abstract
    We report the growth of high quality zinc oxide (ZnO) nanowires on [100] n-type silicon substrates using a physical vapor deposition (PVD) method in two sets of experiments with varying reaction temperatures (800-1200°C) and growth durations (45 min - 60 min). The diameter of the synthesized nanowires ranged from 50-120 nm with a length of 2-7.1 μm. Nanowires had smooth surfaces with relatively uniform diameters. Scanning electron microscope (SEM) studies revealed aggregates of various shapes and dimensions uniformly distributed on the Si substrates. Growth axes of the nanowires were observed to be perpendicular to the surface of the ZnO clusters. These experiments demonstrate the possibility of a simple growth method for such nanowires without the use of any catalysts, thin film deposition or special pre-growth sample treatments hence eliminating any contamination or impurities.
  • Keywords
    II-VI semiconductors; chemical vapour deposition; nanofabrication; nanowires; scanning electron microscopy; semiconductor growth; surface roughness; wide band gap semiconductors; zinc compounds; SEM; Si; ZnO; aggregates; catalysts; contamination; impurities; n-type silicon substrates; physical vapor deposition; scanning electron microscopy; size 2 mum to 7.1 mum; size 50 nm to 120 nm; surface smoothness; temperature 800 degC to 1200 degC; thin film deposition; time 45 min to 60 min; zinc oxide nanowire growth; Nanobioscience; Plasma temperature; Scanning electron microscopy; Silicon; Substrates; Zinc oxide; PVD; Physical Vapor Deposition; Zinc Oxide; ZnO; nanowire;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nanotechnology (IEEE-NANO), 2011 11th IEEE Conference on
  • Conference_Location
    Portland, OR
  • ISSN
    1944-9399
  • Print_ISBN
    978-1-4577-1514-3
  • Electronic_ISBN
    1944-9399
  • Type

    conf

  • DOI
    10.1109/NANO.2011.6144585
  • Filename
    6144585