DocumentCode
3229882
Title
ZnO nanowire growth by physical vapor deposition
Author
Tigli, Onur ; Juhala, Jason
Author_Institution
Electr. & Comput. Eng., Univ. of Miami, Coral Gables, FL, USA
fYear
2011
fDate
15-18 Aug. 2011
Firstpage
608
Lastpage
611
Abstract
We report the growth of high quality zinc oxide (ZnO) nanowires on [100] n-type silicon substrates using a physical vapor deposition (PVD) method in two sets of experiments with varying reaction temperatures (800-1200°C) and growth durations (45 min - 60 min). The diameter of the synthesized nanowires ranged from 50-120 nm with a length of 2-7.1 μm. Nanowires had smooth surfaces with relatively uniform diameters. Scanning electron microscope (SEM) studies revealed aggregates of various shapes and dimensions uniformly distributed on the Si substrates. Growth axes of the nanowires were observed to be perpendicular to the surface of the ZnO clusters. These experiments demonstrate the possibility of a simple growth method for such nanowires without the use of any catalysts, thin film deposition or special pre-growth sample treatments hence eliminating any contamination or impurities.
Keywords
II-VI semiconductors; chemical vapour deposition; nanofabrication; nanowires; scanning electron microscopy; semiconductor growth; surface roughness; wide band gap semiconductors; zinc compounds; SEM; Si; ZnO; aggregates; catalysts; contamination; impurities; n-type silicon substrates; physical vapor deposition; scanning electron microscopy; size 2 mum to 7.1 mum; size 50 nm to 120 nm; surface smoothness; temperature 800 degC to 1200 degC; thin film deposition; time 45 min to 60 min; zinc oxide nanowire growth; Nanobioscience; Plasma temperature; Scanning electron microscopy; Silicon; Substrates; Zinc oxide; PVD; Physical Vapor Deposition; Zinc Oxide; ZnO; nanowire;
fLanguage
English
Publisher
ieee
Conference_Titel
Nanotechnology (IEEE-NANO), 2011 11th IEEE Conference on
Conference_Location
Portland, OR
ISSN
1944-9399
Print_ISBN
978-1-4577-1514-3
Electronic_ISBN
1944-9399
Type
conf
DOI
10.1109/NANO.2011.6144585
Filename
6144585
Link To Document