Title :
Lateral field excited bulk acoustic wave sensors on Langasite working on different operational modes
Author :
Tingfeng Ma ; Ji Wang ; Chao Zhang ; Jin Chen ; Zhitian Zhang
Author_Institution :
Piezoelectr. Device Lab., Ningbo Univ., Ningbo, China
Abstract :
In this work, Langasite LFE devices on both modes are designed and fabricated. The sensitivities of the devices to liquid electrical property (conductivity, permittivity) changes were tested and compared. The experimental results showed that compared to langasite pure-LFE devices, langasite pseudo-LFE devices have superior sensitivities to both liquid conductivity changes and liquid permittivity changes.
Keywords :
acoustic transducers; electrical conductivity; liquids; permittivity; Langasite LFE devices; conductivity changes; langasite pseudo-LFE devices; lateral field excited bulk acoustic wave sensors; liquid electrical property; operational modes; permittivity changes; Electric fields; Electrodes; Frequency measurement; Liquids; Resonant frequency; Sensitivity; Sensors; acoustic wave sensor; langasite; lateral field excitation; operational modes;
Conference_Titel :
Ultrasonics Symposium (IUS), 2011 IEEE International
Conference_Location :
Orlando, FL
Print_ISBN :
978-1-4577-1253-1
DOI :
10.1109/ULTSYM.2011.0295
