Title :
Piezoelectric thin film platform for ultrasound transducer arrays
Author :
Klee, M. ; Mauczok, R. ; Van Heesch, Ch ; Boots, H. ; de Wild, M. ; Veld, B. Op het ; Soer, W. ; Schmitz, G. ; Mleczko, M.
Author_Institution :
Philips Res. Eindhoven, Eindhoven, Netherlands
Abstract :
A piezoelectric thin film MEMs technology platform has been developed that enables processing of miniaturized ultrasound transducer arrays with only minimum 2 mask steps. The thin film ultrasound transducer arrays are operating in the frequency range of >; 50 kHz up to >; 10 MHz. A new class of ultrasound sensors for e.g. proximity sensing and imaging has been developed.
Keywords :
micromechanical devices; piezoelectric thin films; ultrasonic transducer arrays; MEMs technology platform; miniaturized ultrasound transducer array; piezoelectric thin film platform; proximity sensing; ultrasound sensors; Acoustic beams; Acoustics; Sensors; Silicon; Transducers; Ultrasonic imaging; Ultrasonic variables measurement; piezoelectric MEMs; piezoelectric thin film technology platform; piezoelectric thin film ultrasound transducers;
Conference_Titel :
Ultrasonics Symposium (IUS), 2011 IEEE International
Conference_Location :
Orlando, FL
Print_ISBN :
978-1-4577-1253-1
DOI :
10.1109/ULTSYM.2011.6293445
