Title :
Fabrication of antireflection structure by simple annealing of Fe film
Author :
Suehiro, Daisuke ; Nagato, Keisuke ; Hamaguchi, Tetsuya ; Nakao, Masayuki
Author_Institution :
Dept. of Mech. Eng., Univ. of Tokyo, Tokyo, Japan
Abstract :
We have proposed a method of fabricating antireflection structures by annealing an Fe film. By annealing an Fe film in air, iron oxide nanowires can be easily synthesized. Iron oxide nanowires, however, are unsuitable as antireflection structures on their own. The novel process is annealing the nanowires with reduction. By annealing with reduction, the nanowires are transformed into conical structures that are considered to be suitable for antireflection. This method will lead to the low-cost fabrication of antireflection structures.
Keywords :
annealing; antireflection coatings; iron; metallic thin films; Fe; annealing; antireflection structure; conical structure; low cost fabrication; nanowires; Annealing; Films; Iron; Nanowires; Reflectivity; Shape; Substrates; annealing; antireflection structure; iron oxide nanowires; reduction;
Conference_Titel :
Nanotechnology (IEEE-NANO), 2011 11th IEEE Conference on
Conference_Location :
Portland, OR
Print_ISBN :
978-1-4577-1514-3
Electronic_ISBN :
1944-9399
DOI :
10.1109/NANO.2011.6144637