DocumentCode :
3230952
Title :
Fabrication of antireflection structure by simple annealing of Fe film
Author :
Suehiro, Daisuke ; Nagato, Keisuke ; Hamaguchi, Tetsuya ; Nakao, Masayuki
Author_Institution :
Dept. of Mech. Eng., Univ. of Tokyo, Tokyo, Japan
fYear :
2011
fDate :
15-18 Aug. 2011
Firstpage :
588
Lastpage :
591
Abstract :
We have proposed a method of fabricating antireflection structures by annealing an Fe film. By annealing an Fe film in air, iron oxide nanowires can be easily synthesized. Iron oxide nanowires, however, are unsuitable as antireflection structures on their own. The novel process is annealing the nanowires with reduction. By annealing with reduction, the nanowires are transformed into conical structures that are considered to be suitable for antireflection. This method will lead to the low-cost fabrication of antireflection structures.
Keywords :
annealing; antireflection coatings; iron; metallic thin films; Fe; annealing; antireflection structure; conical structure; low cost fabrication; nanowires; Annealing; Films; Iron; Nanowires; Reflectivity; Shape; Substrates; annealing; antireflection structure; iron oxide nanowires; reduction;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Nanotechnology (IEEE-NANO), 2011 11th IEEE Conference on
Conference_Location :
Portland, OR
ISSN :
1944-9399
Print_ISBN :
978-1-4577-1514-3
Electronic_ISBN :
1944-9399
Type :
conf
DOI :
10.1109/NANO.2011.6144637
Filename :
6144637
Link To Document :
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