Title :
All electronic defect inspection, management, and reporting system
Author :
White, Ted R. ; Brenizer, Jason ; Dao, Patrick ; Lin, Jeff ; Sheth, Vardhman ; Miscione, Mark ; Anthony, Brian ; Kolar, Dave ; Apblett, Chris ; Bernstein, Ken ; Chase, Andrew ; Union, Laurie
Author_Institution :
Adv. Products Res. & Dev. Lab., Motorola Inc., Austin, TX, USA
Abstract :
Described is an essentially all electronic defect inspection, management, and reporting system, integrating defect data, images, and bit maps. It is shown how the system increases the efficiency of inline defect monitoring by utilizing ADC, allowing dispositioning of lots at lower levels in the organization, focusing defect reduction efforts on those defects that affect yield, and shortening failure analysis cycle time
Keywords :
inspection; all-electronic defect inspection; automatic defect classification; bit map; defect imaging; defect management system; defect reporting system; failure analysis cycle time; in-line defect monitoring; semiconductor manufacturing; yield; Condition monitoring; Data analysis; Focusing; Image databases; Image sampling; Inspection; Laboratories; Performance analysis; Research and development; Research and development management;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 1999 IEEE/SEMI
Conference_Location :
Boston, MA
Print_ISBN :
0-7803-5217-3
DOI :
10.1109/ASMC.1999.798175
