All electronic defect inspection, management, and reporting system

Author

White, Ted R. ; Brenizer, Jason ; Dao, Patrick ; Lin, Jeff ; Sheth, Vardhman ; Miscione, Mark ; Anthony, Brian ; Kolar, Dave ; Apblett, Chris ; Bernstein, Ken ; Chase, Andrew ; Union, Laurie

Author_Institution

Adv. Products Res. & Dev. Lab., Motorola Inc., Austin, TX, USA

fYear

1999

fDate

1999

Firstpage

25

Lastpage

30

Abstract

Described is an essentially all electronic defect inspection, management, and reporting system, integrating defect data, images, and bit maps. It is shown how the system increases the efficiency of inline defect monitoring by utilizing ADC, allowing dispositioning of lots at lower levels in the organization, focusing defect reduction efforts on those defects that affect yield, and shortening failure analysis cycle time

Keywords

inspection; all-electronic defect inspection; automatic defect classification; bit map; defect imaging; defect management system; defect reporting system; failure analysis cycle time; in-line defect monitoring; semiconductor manufacturing; yield; Condition monitoring; Data analysis; Focusing; Image databases; Image sampling; Inspection; Laboratories; Performance analysis; Research and development; Research and development management;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Semiconductor Manufacturing Conference and Workshop, 1999 IEEE/SEMI

Conference_Location

Boston, MA

ISSN

1078-8743

Print_ISBN

0-7803-5217-3

Type

conf

DOI

10.1109/ASMC.1999.798175

Filename

798175