Title :
Two-dimensional optical scanner with large angular rotation realized by self-assembled micro-elevator
Author :
Fan, L. ; Wu, M.C.
Author_Institution :
Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA
Abstract :
A novel 2D scanner with large mirror area and large angular rotation has been proposed and demonstrated. The mirror is supported by the surface-micromachined micro-elevators by self-assembly. Maximum optical deflection angles of of /spl plusmn/14/spl deg/ and a resonant frequency of 1.5 kHz have been achieved.
Keywords :
beam steering; electrostatic actuators; micro-optics; micromachining; micromechanical resonators; mirrors; optical deflectors; optical fabrication; optical scanners; 2D optical scanner; MEMS technology; beam steering; electrostatic force; large angular rotation; large mirror area; microactuator plates; micromirror; resonant frequency; self-assembled micro-elevator; surface-micromachined; Actuators; Electrodes; High speed optical techniques; Micromechanical devices; Micromirrors; Mirrors; Optical beams; Optical sensors; Two dimensional displays; Voltage;
Conference_Titel :
Broadband Optical Networks and Technologies: An Emerging Reality/Optical MEMS/Smart Pixels/Organic Optics and Optoelectronics. 1998 IEEE/LEOS Summer Topical Meetings
Conference_Location :
Monterey, CA, USA
Print_ISBN :
0-7803-4953-9
DOI :
10.1109/LEOSST.1998.689857
