A 0.5-50 GHz on-wafer, intermodulation, load-pull and power measurement system

Author

Demmler, M. ; Hughes, Brian ; Cognata, A.

Author_Institution

Fraunhofer-Inst. fur Angewandte Festkorperphys., Freiburg, Germany

fYear

1995

fDate

16-20 May 1995

Firstpage

1041

Abstract

A novel on-wafer, intermodulation, load-pull and power measurement system for characterizing devices and circuits for frequencies up to 50 GHz has been developed. The two-tone intermodulation measurement capabilities were added to an existing power and harmonic load-pull measurement system using the 50 GHz spectrum analyzer HP8565. Fundamental power levels and all measured intermodulation (IM) products are vector corrected to the probe tips of the DUT. A key feature of the described system are the vector corrected IM measurements and the capability to study the effects of load impedance on intermodulation.<>

Keywords

UHF measurement; integrated circuit testing; intermodulation measurement; microwave measurement; millimetre wave measurement; power measurement; semiconductor device testing; 0.5 to 50 GHz; EHF; HP8565; MM-wave measurement; SHF; UHF; load impedance effects; load-pull measurement; onwafer measurement system; power measurement; spectrum analyzer; two-tone intermodulation measurement; vector corrected IM measurements; Calibration; Distortion measurement; Frequency measurement; Impedance measurement; Microwave measurements; Power amplifiers; Power generation; Power measurement; Probes; Spectral analysis;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Symposium Digest, 1995., IEEE MTT-S International

Conference_Location

Orlando, FL, USA

ISSN

0149-645X

Print_ISBN

0-7803-2581-8

Type

conf

DOI

10.1109/MWSYM.1995.406150

Filename

406150