Title :
A 0.5-50 GHz on-wafer, intermodulation, load-pull and power measurement system
Author :
Demmler, M. ; Hughes, Brian ; Cognata, A.
Author_Institution :
Fraunhofer-Inst. fur Angewandte Festkorperphys., Freiburg, Germany
Abstract :
A novel on-wafer, intermodulation, load-pull and power measurement system for characterizing devices and circuits for frequencies up to 50 GHz has been developed. The two-tone intermodulation measurement capabilities were added to an existing power and harmonic load-pull measurement system using the 50 GHz spectrum analyzer HP8565. Fundamental power levels and all measured intermodulation (IM) products are vector corrected to the probe tips of the DUT. A key feature of the described system are the vector corrected IM measurements and the capability to study the effects of load impedance on intermodulation.<>
Keywords :
UHF measurement; integrated circuit testing; intermodulation measurement; microwave measurement; millimetre wave measurement; power measurement; semiconductor device testing; 0.5 to 50 GHz; EHF; HP8565; MM-wave measurement; SHF; UHF; load impedance effects; load-pull measurement; onwafer measurement system; power measurement; spectrum analyzer; two-tone intermodulation measurement; vector corrected IM measurements; Calibration; Distortion measurement; Frequency measurement; Impedance measurement; Microwave measurements; Power amplifiers; Power generation; Power measurement; Probes; Spectral analysis;
Conference_Titel :
Microwave Symposium Digest, 1995., IEEE MTT-S International
Conference_Location :
Orlando, FL, USA
Print_ISBN :
0-7803-2581-8
DOI :
10.1109/MWSYM.1995.406150
