Title :
Near field microscopy of vertical cavity lasers
Author :
Kash, J.A. ; Pezeshki, B. ; Agahi, F. ; Kisker, D.W.
Author_Institution :
IBM Thomas J. Watson Res. Center, Yorktown Heights, NY, USA
fDate :
30 Oct-2 Nov 1995
Abstract :
We show that near-field optical microscopy (NFOM) can be a powerful tool for the diagnosis and characterization of semiconductor laser structures, since it can obtain optical spectra with a spatial resolution better than 100nm. The capabilities of NFOM are demonstrated by characterizing a VCSEL in which spatial nonuniformities in the material cause a multi-mode emission pattern
Keywords :
laser variables measurement; optical microscopy; semiconductor lasers; surface emitting lasers; VCSEL; diagnosis; multi-mode emission; near-field optical microscopy; optical spectra; semiconductor laser; spatial resolution; vertical cavity laser; Interference; Laser modes; Mirrors; Optical feedback; Optical microscopy; Optical noise; Optical scattering; Stimulated emission; Surface emitting lasers; Vertical cavity surface emitting lasers;
Conference_Titel :
Lasers and Electro-Optics Society Annual Meeting, 1995. 8th Annual Meeting Conference Proceedings, Volume 1., IEEE
Conference_Location :
San Francisco, CA
Print_ISBN :
0-7803-2450-1
DOI :
10.1109/LEOS.1995.484791
