Title :
A generic MEMS sensor based on differential measurement
Author :
Quero, José M. ; Brey, José J.
Author_Institution :
Sch. of Eng., Seville Univ., Spain
Abstract :
There are industrial applications where an accurate estimate of a radiation source position is needed. In this paper, a sensor based on differential measurement is presented. This sensor provides an accurate signal proportional to the incident angle of radiation. A large gain factor is possible with the proposed structure of the microsensor. As a result, a robust, low-cost device is achieved. The goodness of this approach makes it suitable for several new applications.
Keywords :
microsensors; optical sensors; ultrasonic transducers; differential measurement; gain factor; generic MEMS sensor; microsensor; radiation source position estimation; robust low-cost device; Costs; Frequency; Gas detectors; Microelectromechanical systems; Micromechanical devices; Microsensors; Radiation detectors; Robustness; Sensor arrays; Sensor phenomena and characterization;
Conference_Titel :
IECON 02 [Industrial Electronics Society, IEEE 2002 28th Annual Conference of the]
Print_ISBN :
0-7803-7474-6
DOI :
10.1109/IECON.2002.1182882
