Title :
On-wafer calibration techniques for measurement of microwave circuits and devices on thin substrates
Author :
Pla, J. ; Struble, M. ; Colomb, F.
Author_Institution :
Adv. Device Center, Raytheon Co., Andover, MA, USA
Abstract :
Two sets of on-wafer microstrip calibration standards were fabricated on 50 /spl mu/m GaAs and 25 /spl mu/m polyimide substrates for the purpose of measuring microwave circuits and devices up to 50 GHz. The accuracies of one and two tier LRM and TRL calibration techniques were investigated on PHEMT devices. Substantial improvements were found with the use of a weight function in the averaging of two tier TRL and LRM-TRL calibrations. The dependence of the isolation on the spacing between the input and output probes was also determined for these thin substrates.<>
Keywords :
MIMIC; MMIC; S-parameters; calibration; gallium arsenide; integrated circuit testing; measurement standards; microstrip components; microwave measurement; millimetre wave measurement; polymer films; substrates; 25 micron; 50 GHz; 50 micron; GaAs; GaAs substrates; PHEMT devices; TRL calibration technique; isolation dependence; microwave circuits; microwave devices; on-wafer calibration techniques; one tier LRM technique; onwafer microstrip calibration standards; polyimide substrates; probe spacing; thin substrates; two tier LRM technique; weight function; Calibration; Gallium arsenide; Measurement standards; Microstrip; Microwave circuits; Microwave devices; Microwave measurements; Microwave theory and techniques; PHEMTs; Polyimides;
Conference_Titel :
Microwave Symposium Digest, 1995., IEEE MTT-S International
Conference_Location :
Orlando, FL, USA
Print_ISBN :
0-7803-2581-8
DOI :
10.1109/MWSYM.1995.406151
