2D electro-optic probing combined with field theory based multimode wave amplitude extraction: a new approach to on-wafer measurement

Author

David, Gladbin ; Schroeder, W. ; Jager, D. ; Wolff, I.

Author_Institution

Duisburg Univ., Germany

fYear

1995

fDate

16-20 May 1995

Firstpage

1049

Abstract

A novel approach to on-wafer measurement is proposed, which combines the direct electro-optic probing technique with a field theory based extraction technique for the modal voltages of all relevant modes at arbitrary internal ports of a (III-V) MMIC. The approach can be extended to obtain the complex modal amplitudes of forward and backward propagating waves on interconnecting transmission lines. This makes it a unique method for measurement of mode conversion in N-port components and their multimode S-parameter characterization.<>

Keywords

MMIC; S-parameters; electromagnetic field theory; integrated circuit testing; measurement by laser beam; microwave measurement; 2D electro-optic probing; MMIC; backward propagating waves; complex modal amplitudes; field theory based extraction; forward propagating waves; interconnecting transmission lines; modal voltages; multimode S-parameter characterization; multimode wave amplitude extraction; onwafer measurement; Coplanar waveguides; Electric variables measurement; Integrated circuit interconnections; MMICs; Optical modulation; Optical polarization; Power transmission lines; Signal resolution; Transmission line measurements; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Symposium Digest, 1995., IEEE MTT-S International

Conference_Location

Orlando, FL, USA

ISSN

0149-645X

Print_ISBN

0-7803-2581-8

Type

conf

DOI

10.1109/MWSYM.1995.406152

Filename

406152