Title :
2D electro-optic probing combined with field theory based multimode wave amplitude extraction: a new approach to on-wafer measurement
Author :
David, Gladbin ; Schroeder, W. ; Jager, D. ; Wolff, I.
Author_Institution :
Duisburg Univ., Germany
Abstract :
A novel approach to on-wafer measurement is proposed, which combines the direct electro-optic probing technique with a field theory based extraction technique for the modal voltages of all relevant modes at arbitrary internal ports of a (III-V) MMIC. The approach can be extended to obtain the complex modal amplitudes of forward and backward propagating waves on interconnecting transmission lines. This makes it a unique method for measurement of mode conversion in N-port components and their multimode S-parameter characterization.<>
Keywords :
MMIC; S-parameters; electromagnetic field theory; integrated circuit testing; measurement by laser beam; microwave measurement; 2D electro-optic probing; MMIC; backward propagating waves; complex modal amplitudes; field theory based extraction; forward propagating waves; interconnecting transmission lines; modal voltages; multimode S-parameter characterization; multimode wave amplitude extraction; onwafer measurement; Coplanar waveguides; Electric variables measurement; Integrated circuit interconnections; MMICs; Optical modulation; Optical polarization; Power transmission lines; Signal resolution; Transmission line measurements; Voltage;
Conference_Titel :
Microwave Symposium Digest, 1995., IEEE MTT-S International
Conference_Location :
Orlando, FL, USA
Print_ISBN :
0-7803-2581-8
DOI :
10.1109/MWSYM.1995.406152
