Title :
The total CIM system for semiconductor plants
Author_Institution :
OKI Electr. Ind. Co. Ltd., Tokyo, Japan
Abstract :
A CIM (computer-integrated manufacturing) system implemented in a plant for memory-device production is described. It is noted that application of this system is making it possible to prevent operational error, to reduce manpower, and to improve quality control. After the installation of an ultraclean process, a high-yield VLSI plant with fewer operators was realized
Keywords :
CAD/CAM; VLSI; integrated circuit manufacture; integrated memory circuits; manufacturing computer control; quality control; computer-integrated manufacturing; fewer operators; high-yield VLSI plant; memory-device production; prevent operational error; quality control; reduce manpower; semiconductor plants; total CIM system; ultraclean process; Automatic control; Automation; Computer integrated manufacturing; Computerized monitoring; Control systems; Production control; Production systems; Quality control; Transportation; Vehicles;
Conference_Titel :
Semiconductor Manufacturing Science Symposium, 1990. ISMSS 1990., IEEE/SEMI International
Conference_Location :
Burlingame, CA
DOI :
10.1109/ISMSS.1990.66124
