Title :
High-frequency on-wafer testing with freely positionable silicon-on-sapphire photoconductive probes
Author :
Pfeifer, Tom ; Heiliger, H.-M. ; von Kamienski, E.S. ; Roskos, Hartmut G. ; Kurz, H.
Author_Institution :
Inst. fur Halbleitertech., Tech. Hochschule Aachen, Germany
Abstract :
We describe the characterization of external photoconductive probes as both generators and detectors of picosecond electric transients. The probes are manufactured on transparent silicon-on-sapphire substrates and are suited for on-wafer testing in integrated circuits. We characterize the freely positionable probes concerning linearity, sensitivity, time resolution and invasiveness.<>
Keywords :
integrated circuit testing; metal-semiconductor-metal structures; millimetre wave measurement; photoconducting switches; probes; signal sampling; transients; HF onwafer testing; MSM sampling probes; Si-Al/sub 2/O/sub 3/; high-frequency on-wafer testing; integrated circuits; linearity; picosecond electric transients; positionable SOS photoconductive probes; sensitivity; silicon-on-sapphire probes; time resolution; Character generation; Detectors; Dipole antennas; Optical pumping; Photoconductivity; Probes; Pulse measurements; Sampling methods; Switches; Testing;
Conference_Titel :
Microwave Symposium Digest, 1995., IEEE MTT-S International
Conference_Location :
Orlando, FL, USA
Print_ISBN :
0-7803-2581-8
DOI :
10.1109/MWSYM.1995.406153
