Title :
A compact microstructure mechanical property measuring system
Author :
Chen, Tao ; Zhang, Lin ; Wu, Jian ; Liu, Shibing ; Zuo, Tiechuan
Author_Institution :
Inst. of Laser Eng., Beijing Univ. of Technol., Beijing
Abstract :
In this paper, we introduce a compact measuring system, to analyze microstructure force property. The system is specially designed in which a mechanical test machine, a PCB board based on an USB connection for device driving and data collection, and processing software were contained. This system can be used for measuring deformation characteristics of MEMS structures by bending method. To confirm the feasibility of the system, an experiment was performed on a micro pillar.
Keywords :
measurement systems; micromechanical devices; printed circuits; MEMS structures; PCB board; USB connection; bending method; compact measuring system; data collection; device driving; mechanical test machine; micro pillar; microstructure force property; microstructure mechanical property measuring system; Distortion measurement; Force measurement; Hardware; Mechanical factors; Mechanical variables measurement; Micromechanical devices; Microstructure; Stress; Transistors; Universal Serial Bus; MEMS measurement; USB-Based system; material force property;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems, 2008. NEMS 2008. 3rd IEEE International Conference on
Conference_Location :
Sanya
Print_ISBN :
978-1-4244-1907-4
Electronic_ISBN :
978-1-4244-1908-1
DOI :
10.1109/NEMS.2008.4484275
