Title :
The Virtual Fab the core of future technology development
Author :
Torres, Kenneth ; Smith, Ellwood ; McDonald, Chris ; Cleavelin, C. Rinn
Author_Institution :
SEMATECH, USA
Abstract :
SEMATECH´s Front End (FEP) projects involve among universities, equipment/material suppliers, member companies and SEMATECH. The Virtual Fab will be at the core of research and development for SEMATECH, helping pave the way for new strategies to resolve complicated problems. The Virtual Fab integrates SEMATECH´s Advanced Technology Development Fab (ATDF) with those of universities, equipment suppliers and member companies through offsite processing at those locations with the core processing at SEMATECH
Keywords :
integrated circuit manufacture; production engineering computing; research and development management; technological forecasting; virtual reality; Advanced Technology Development Fab; SEMATECH; Virtual Fab; core processing; equipment suppliers; front end projects; future technology development; material suppliers; offsite processing; universities; Dielectrics; Educational institutions; Instruments; Isolation technology; Laboratories; Manufacturing processes; Materials testing; Research and development; Semiconductor device manufacture; Transistors;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 1999 IEEE/SEMI
Conference_Location :
Boston, MA
Print_ISBN :
0-7803-5217-3
DOI :
10.1109/ASMC.1999.798229
