Title :
Switching performance analysis in RF MEMS capacitive shunt switches by geometric parameters trade-offs
Author :
Bahmanyar, Parvin ; Mafinezhad, Kh ; Bahmanyar, M.
Author_Institution :
Dept. of Eng., Ferdowsi Univ. of Mashhad, Mashhad, Iran
Abstract :
The high performance of Radio Frequency Micro-Electro-Mechanical Systems (MEMS) based switches like low insertion loss, high isolation and high bandwidth make them to play an important role in microwave switching. This paper presents an RF MEMS shunt capacitive switch for Ka band applications. The effect of various geometric dimensional parameters on the switching behaviour of proposed design using Electro Magnetic 3 Dimension simulator EM3DS software tool is investigated. The switch structure has been optimized on the geometrical sizes.
Keywords :
capacitor switching; microswitches; microwave switches; RF MEMS capacitive shunt switches; electromagnetic 3D simulator EM3DS software; geometric dimensional parameters; geometric parameters trade-offs; geometrical sizes; microwave switching; radiofrequency microelectro-mechanical systems; switching performance analysis; Coplanar waveguides; Micromechanical devices; Microswitches; Radio frequency; RF MEMS shunt switch; geometric behaviour of MEMS switch;
Conference_Titel :
Circuits and Systems (APCCAS), 2010 IEEE Asia Pacific Conference on
Conference_Location :
Kuala Lumpur
Print_ISBN :
978-1-4244-7454-7
DOI :
10.1109/APCCAS.2010.5775030
