DocumentCode :
3232306
Title :
Nanofabrication: Stimulus For Interdisciplinary Research
Author :
Wolf, E.D. ; Galvin, G.J.
Author_Institution :
Cornell University
fYear :
1988
fDate :
2-4 Nov. 1988
Firstpage :
408
Lastpage :
411
Keywords :
Boolean functions; Chemical lasers; Data structures; Etching; Lithography; Nanofabrication; Nonlinear optics; Optical device fabrication; Optical devices; Particle beam optics;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics Society Annual Meeting, 1988. Conference Proceedings. LEOS '88.
Conference_Location :
Santa Clara, CA, USA
Type :
conf
DOI :
10.1109/LEOS.1988.689867
Filename :
689867
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3232306
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