Title :
Electrostriction for thin films: an alternative to piezoelectricity?
Author :
Defay, E. ; Cueff, M. ; Arndt, G. ; Ben Hassine, N.
Author_Institution :
CEA LETI, Grenoble, France
Abstract :
In this paper, we discuss electrostriction in the special case of thin film for resonators and actuators. More specifically, we try to emphasize the differences between pure piezoelectric and electrostrictive materials. Several materials are investigated here as Pb(Zr,Ti)O3, (Ba,Sr)TiO3, LiNbO3 and even AlN, a pure piezoelectric material.
Keywords :
III-V semiconductors; aluminium compounds; barium compounds; electrostriction; lead compounds; lithium compounds; piezoelectric thin films; strontium compounds; wide band gap semiconductors; (BaSr)TiO3; AlN; LiNbO3; PZT; electrostrictin; electrostrictive materials; piezoelectric material; piezoelectric materials; piezoelectricity; thin films; Acoustics; Couplings; Electric fields; Electrostriction; Materials; Piezoelectricity; Resonant frequency;
Conference_Titel :
Ultrasonics Symposium (IUS), 2011 IEEE International
Conference_Location :
Orlando, FL
Print_ISBN :
978-1-4577-1253-1
DOI :
10.1109/ULTSYM.2011.0326