A single-axis area changeable capacitive accelerometer with folded springs

Author

Zhou, Jingran ; Chen, Weiyou ; Liu, Caixia ; Liu, Ziran ; Xue, Hailin ; Zhu, Feng ; Shen, Liang ; Dong, Wei

Author_Institution

State Key Lab. on Integrated Optoelectron., Jilin Univ., Jilin

fYear

2008

fDate

6-9 Jan. 2008

Firstpage

128

Lastpage

131

Abstract

A single-axis area changeable capacitive accelerometer with folded springs is reported in this paper. The accelerometer is made up of upper and lower electrodes, working as a parallel plate capacitance, with folded springs on the upper electrode. The output signals of this device are linear. Analyzed by the ANSYS, it shows the design of the accelerometer is feasible. We have fabricated the upper electrode with folded springs using the inductively couple plasma (ICP) and the lower electrode by coating an Al layer on the SiO₂.

Keywords

accelerometers; aluminium compounds; capacitive sensors; microsensors; silicon compounds; springs (mechanical); Al; SiO₂; area changeable capacitive accelerometer; folded springs; inductively couple plasma; parallel plate capacitance; Acceleration; Accelerometers; Assembly; Capacitance; Circuits; Electrodes; Micromechanical devices; Microsensors; Sensor phenomena and characterization; Springs; MEMS; accerometer; area changeable; simulation;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems, 2008. NEMS 2008. 3rd IEEE International Conference on

Conference_Location

Sanya

Print_ISBN

978-1-4244-1907-4

Electronic_ISBN

978-1-4244-1908-1

Type

conf

DOI

10.1109/NEMS.2008.4484302

Filename

4484302