Title :
A single-axis area changeable capacitive accelerometer with folded springs
Author :
Zhou, Jingran ; Chen, Weiyou ; Liu, Caixia ; Liu, Ziran ; Xue, Hailin ; Zhu, Feng ; Shen, Liang ; Dong, Wei
Author_Institution :
State Key Lab. on Integrated Optoelectron., Jilin Univ., Jilin
Abstract :
A single-axis area changeable capacitive accelerometer with folded springs is reported in this paper. The accelerometer is made up of upper and lower electrodes, working as a parallel plate capacitance, with folded springs on the upper electrode. The output signals of this device are linear. Analyzed by the ANSYS, it shows the design of the accelerometer is feasible. We have fabricated the upper electrode with folded springs using the inductively couple plasma (ICP) and the lower electrode by coating an Al layer on the SiO2.
Keywords :
accelerometers; aluminium compounds; capacitive sensors; microsensors; silicon compounds; springs (mechanical); Al; SiO2; area changeable capacitive accelerometer; folded springs; inductively couple plasma; parallel plate capacitance; Acceleration; Accelerometers; Assembly; Capacitance; Circuits; Electrodes; Micromechanical devices; Microsensors; Sensor phenomena and characterization; Springs; MEMS; accerometer; area changeable; simulation;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems, 2008. NEMS 2008. 3rd IEEE International Conference on
Conference_Location :
Sanya
Print_ISBN :
978-1-4244-1907-4
Electronic_ISBN :
978-1-4244-1908-1
DOI :
10.1109/NEMS.2008.4484302
