Title :
SAW parameters for langasite at high temperatures
Author :
Mayer, Elena ; Eisele, David ; Reindl, Leonhard M. ; Plessky, Victor P. ; Richter, Denny ; Fritze, Holger
Author_Institution :
Dept. of Microsyst. Eng. - IMTEK, Univ. of Freiburg, Freiburg, Germany
Abstract :
For three cuts of langasite with Euler angles (0°,138.5°,27°), (0°,22°,31°), and (0°,22°,90°) the temperature dependencies of SAW parameters - velocities, reflection coefficients and propagation loss were determined experimentally up to 800°C. For this, the test structures - delay lines and resonators, operating in the frequency range from 200 MHz up to 600 MHz, were designed and fabricated using Pt metallization. The influence of a passivation layer of Al2O3 was investigated. The perspective for the use of the STW cut is discussed.
Keywords :
acoustic resonators; acoustic wave propagation; acoustic wave reflection; acoustic wave velocity; delay lines; gallium compounds; high-temperature effects; lanthanum compounds; metallisation; piezoelectric materials; surface acoustic waves; Al2O3; Al2O3 passivation layer; Euler angles; La3Ga5SiO4; Pt; Pt metallization; SAW parameters; delay lines; frequency 200 MHz to 600 MHz; high temperatures; langasite; propagation loss; reflection coefficients; resonators; temperature dependencies; velocities; Admittance; Gratings; Heating; Propagation losses; Resonant frequency; Surface acoustic waves; Temperature sensors;
Conference_Titel :
Ultrasonics Symposium (IUS), 2011 IEEE International
Conference_Location :
Orlando, FL
Print_ISBN :
978-1-4577-1253-1
DOI :
10.1109/ULTSYM.2011.0513
