SAW parameters for langasite at high temperatures

Author

Mayer, Elena ; Eisele, David ; Reindl, Leonhard M. ; Plessky, Victor P. ; Richter, Denny ; Fritze, Holger

Author_Institution

Dept. of Microsyst. Eng. - IMTEK, Univ. of Freiburg, Freiburg, Germany

fYear

2011

fDate

18-21 Oct. 2011

Firstpage

2069

Lastpage

2073

Abstract

For three cuts of langasite with Euler angles (0°,138.5°,27°), (0°,22°,31°), and (0°,22°,90°) the temperature dependencies of SAW parameters - velocities, reflection coefficients and propagation loss were determined experimentally up to 800°C. For this, the test structures - delay lines and resonators, operating in the frequency range from 200 MHz up to 600 MHz, were designed and fabricated using Pt metallization. The influence of a passivation layer of Al₂O₃ was investigated. The perspective for the use of the STW cut is discussed.

Keywords

acoustic resonators; acoustic wave propagation; acoustic wave reflection; acoustic wave velocity; delay lines; gallium compounds; high-temperature effects; lanthanum compounds; metallisation; piezoelectric materials; surface acoustic waves; Al₂O₃; Al₂O₃ passivation layer; Euler angles; La₃Ga₅SiO₄; Pt; Pt metallization; SAW parameters; delay lines; frequency 200 MHz to 600 MHz; high temperatures; langasite; propagation loss; reflection coefficients; resonators; temperature dependencies; velocities; Admittance; Gratings; Heating; Propagation losses; Resonant frequency; Surface acoustic waves; Temperature sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium (IUS), 2011 IEEE International

Conference_Location

Orlando, FL

ISSN

1948-5719

Print_ISBN

978-1-4577-1253-1

Type

conf

DOI

10.1109/ULTSYM.2011.0513

Filename

6293543