TCAD as an integral part of the semiconductor manufacturing environment

This work shows a new methodology which automates the necessary links between technology computer aided design (TCAD) and the semiconductor manufacturing environment to a high extent. Initially a short overview of a typical chain of processes during the fabrication of an integrated circuit is given. Furthermore an overview on the relations to the respective simulator tools is given. The interfaces between the fabrication process and simulation are identified and the detailed structure of the interfaces is outlined. A comprehensive overview over the interactions in this integrated system is given as well. Finally the strengths of such a structured and integrated approach are demonstrated with a case in a real semiconductor fabrication environment