A novel tuning fork vibratory microgyroscope with improved spring beams

To increase the sensitivity and bandwidth for a tuning fork vibratory microgyroscope, a novel structure with improved spring beams is presented. The shape of the suspension beams are optimized by a cellular automata approach. Electrostatic excitation and capacitive detection mechanism are employed. The gyroscope works at atmospheric pressure, and the dominant air damping of the gyroscope is the slide-film damping, which ensures high Q-factors for both driving and sensing modes even at atmospheric pressure. The improved gyroscope is fabricated by the bulk silicon micromachining technology and packaged at atmospheric pressure. Experimental results show that the sensitivity and bandwidth of the microgyroscope are both promoted.