Title :
A 8-resistor SU-8 accelerometer with reduced cross axis sensitivity
Author :
Ray, Prasenjit ; Rao, V. Ramgopal ; Apte, Prakash R.
Author_Institution :
Dept. of Electr. Eng., Indian Inst. of Technol. Bombay, Mumbai, India
Abstract :
The MEMS accelerometer has a high cross sensitivity due to proof mass being eccentric. This paper gives results for a SU-8 z-axis accelerometer that uses 8-resistor Wheatstone-bridge to reduce the x-axis and y-axis cross sensitivity by 2 orders of magnitude compared to the conventional 4-resistor Wheatstone-bridge arrangement.
Keywords :
accelerometers; micromechanical devices; 8-resistor SU-8 accelerometer; 8-resistor Wheatstone-bridge; MEMS accelerometer; SU-8 z-axis accelerometer; reduced cross axis sensitivity; Acceleration; Accelerometers; Bridge circuits; Piezoresistance; Polymers; Resistors; Sensitivity;
Conference_Titel :
Circuits and Systems (APCCAS), 2010 IEEE Asia Pacific Conference on
Conference_Location :
Kuala Lumpur
Print_ISBN :
978-1-4244-7454-7
DOI :
10.1109/APCCAS.2010.5775073
