Title :
MEMS based sensors for explosive detection: Development and discussion
Author :
Kong, Deyi ; Qi, Yongguang ; Zhou, Lili ; Lin, Bingtao ; Li, Zhuang ; Zhu, Ronghua ; Chen, Chilai
Author_Institution :
Inst. of Intell. Machines, Chinese Acad. of Sci., Hefei
Abstract :
In this paper, the development of explosive detection with MEMS technology was briefly reviewed. Various detecting methods were classified in microcalorimetric spectroscopy, optical displacement measuring, resonance frequency shift measuring, piezoresistive strain monitoring, heat absorption or release monitoring, and FA-IMS. Advantages and disadvantages of each method were respectively discussed.
Keywords :
calorimeters; microsensors; piezoresistive devices; MEMS based sensors; heat absorption; microcalorimetric spectroscopy; optical displacement measurement; piezoresistive strain monitoring; resonance frequency shift measurement; Displacement measurement; Explosives; Frequency measurement; Micromechanical devices; Monitoring; Optical sensors; Resonance; Resonant frequency; Spectroscopy; Strain measurement; MEMS; explosive detection; sensor;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems, 2008. NEMS 2008. 3rd IEEE International Conference on
Conference_Location :
Sanya
Print_ISBN :
978-1-4244-1907-4
Electronic_ISBN :
978-1-4244-1908-1
DOI :
10.1109/NEMS.2008.4484332
