Silicon beam structures comprising nanophotonics as NEMS sensors

We present design and simulation results of a NEMS (nanoelectromechanical system) based mechanical sensor using a silicon suspended-beam comprising two-dimensional (2-D) photonic crystal (PhC) microcavity structure. A silicon line defect in a 2-D photonic crystal is considered as a waveguide for confining light propagation within waveguide. Various kinds of micro-cavity within the line defect are added as resonant band gap structure to form a PhC waveguide (PhCWG) based optical filter with sharp resonant peak. Since the resonant wavelength of output spectrum is sensitive to the shape of air holes and defect length of the micro-cavity. Results of resonant wavelength shift regarding to deformation or force loading on the suspended PhCWG beam are calculated. Thus deformation and force loads can be detected in terms of resonant wavelength shift.