Nanopatterning and the flexible stamp replication using thermal and roll typed UV-NIL

In case of UV-Nanoimprint Lithography, a transparent quartz stamp with nano-scale patterns has the problems that are difficult to fabricate, handle and keep. Also, it´s very expensive to fabricate nano-scale quartz stamp. Furthermore, according to enlarge the substrate size, these problems will be got out of control. In this paper, flexible and transparent replica stamps are fabricated using the polycarbonate, PDMS and polyurethane acryl films by thermal nano-imprint tools (ANT-6T) in order to get over these problems. To verify these stamps, UV nano-imprint lithography process is executed on the roll typed UV-NIL tools (ANT-6R) which is developed by KIMM.