Integrating bio-sensing functions on CMOS chips

Author

Guiducci, C. ; Temiz, Y. ; Leblebici, Y. ; Accastelli, E. ; Ferretti, A. ; Cappi, G. ; Bianchi, E.

Author_Institution

Lab. of Life Sci. Electron., EPFL, Lausanne, Switzerland

fYear

2010

fDate

6-9 Dec. 2010

Firstpage

548

Lastpage

551

Abstract

The paper discusses the recent achievements in the development of chips with integrated sensing of biomolecules. In particular, it focuses on integrated sensing electrodes on silicon and presents innovative solutions for the enhanced robustness of the electrodes towards cleaning processes and electrolytes. In this study, a microfabrication technology for 3D-integrated disposable chip layers that enables the reusability of the overall system for many times is presented.

Keywords

CMOS integrated circuits; biomedical electrodes; biomedical electronics; biosensors; electrolytes; elemental semiconductors; microfabrication; molecular biophysics; silicon; three-dimensional integrated circuits; 3D-integrated disposable chip layer; CMOS chip; Si; biomolecules; biosensing function; cleaning process; electrolytes; integrated biosensor; integrated sensing electrode; microfabrication technology; Biosensors; CMOS integrated circuits; Electrodes; Metals; Silicon; Three dimensional displays; 3D-IC; biochips; integrated biosensors; post-processing; sensing electrodes;

fLanguage

English

Publisher

ieee

Conference_Titel

Circuits and Systems (APCCAS), 2010 IEEE Asia Pacific Conference on

Conference_Location

Kuala Lumpur

Print_ISBN

978-1-4244-7454-7

Type

conf

DOI

10.1109/APCCAS.2010.5775088

Filename

5775088