Hybrid macromodels for modeling and simulation of a z-axis micro accelerometer

A design method based on hybrid macromodels for system-level modeling and simulation of MEMS devices was presented, by which the MEMS device was firstly divided into several substructures, then macromodels for the substructures with regular geometry were generated by analytical method and the ones with odd geometry by numerical method. After that, the created macromodels were interconnected according to the original topology of the MEMS device for system-level simulation. The method combines the advantages of both the analytical and numerical methods. Therefore, not only the parameterized design for some key components can be performed, but also the innovative design for some odd substructures can be realized. In the paper, we took the design of a z-axis micro accelerometer as an example to demonstrate the feasibility and efficiency of the proposed method.